Yıl: 2015 Cilt: 4 Sayı: 1 Sayfa Aralığı: 33 - 39 Metin Dili: Diğer İndeks Tarihi: 29-07-2022

Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results

Öz:
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Anahtar Kelime:

Konular: Mühendislik, Makine

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Öz:
Many of today s technologies and research techniques depend on process and methods in high andultra- high vacuum chambers. High temperature vacuum chambers require innovative concept and useof unusual materials in design to achieve quality performance. In order to obtain quality performance,the temperature and gas delivery on the vacuum chamber surface must be uniformly distributed. In thiswork, a new funnel for high temperature vacuum chamber was successfully designed and tested usingcomputer - based simulation techniques. The funnel was made of quartz crystal (Grade 2) due to abilityto absorb temperature, properties of low gas permeability and low temperature coefficient. In order tomitigate O- rings from high temperature failure and to reduce non-uniformity effect during temperaturedelivery, a new quartz funnel was developed. The simulation and experimental results show thatuniformity distributions in temperature of vacuum chamber surface were obtained with new funneldesign.
Anahtar Kelime:

Konular: Mühendislik, Makine
Belge Türü: Makale Makale Türü: Araştırma Makalesi Erişim Türü: Erişime Açık
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APA KAPLAN E, Ünker F, ÇUVALCI O (2015). Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. , 33 - 39.
Chicago KAPLAN ERDAR,Ünker Faruk,ÇUVALCI OLKAN Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. (2015): 33 - 39.
MLA KAPLAN ERDAR,Ünker Faruk,ÇUVALCI OLKAN Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. , 2015, ss.33 - 39.
AMA KAPLAN E,Ünker F,ÇUVALCI O Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. . 2015; 33 - 39.
Vancouver KAPLAN E,Ünker F,ÇUVALCI O Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. . 2015; 33 - 39.
IEEE KAPLAN E,Ünker F,ÇUVALCI O "Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results." , ss.33 - 39, 2015.
ISNAD KAPLAN, ERDAR vd. "Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results". (2015), 33-39.
APA KAPLAN E, Ünker F, ÇUVALCI O (2015). Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. International Journal of Automotive Engineering and Technologies, 4(1), 33 - 39.
Chicago KAPLAN ERDAR,Ünker Faruk,ÇUVALCI OLKAN Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. International Journal of Automotive Engineering and Technologies 4, no.1 (2015): 33 - 39.
MLA KAPLAN ERDAR,Ünker Faruk,ÇUVALCI OLKAN Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. International Journal of Automotive Engineering and Technologies, vol.4, no.1, 2015, ss.33 - 39.
AMA KAPLAN E,Ünker F,ÇUVALCI O Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. International Journal of Automotive Engineering and Technologies. 2015; 4(1): 33 - 39.
Vancouver KAPLAN E,Ünker F,ÇUVALCI O Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results. International Journal of Automotive Engineering and Technologies. 2015; 4(1): 33 - 39.
IEEE KAPLAN E,Ünker F,ÇUVALCI O "Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results." International Journal of Automotive Engineering and Technologies, 4, ss.33 - 39, 2015.
ISNAD KAPLAN, ERDAR vd. "Design of quartz chemical delivery parts for high temperature vacuum chambers base of simulation results". International Journal of Automotive Engineering and Technologies 4/1 (2015), 33-39.